<SEC-DOCUMENT>0000720500-17-000012-index.html : 20170202
<SEC-HEADER>0000720500-17-000012.hdr.sgml : 20170202
<ACCEPTANCE-DATETIME>20170202171936
ACCESSION NUMBER:		0000720500-17-000012
CONFORMED SUBMISSION TYPE:	S-3/A
PUBLIC DOCUMENT COUNT:		4
FILED AS OF DATE:		20170202
DATE AS OF CHANGE:		20170202

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		S-3/A
		SEC ACT:		1933 Act
		SEC FILE NUMBER:	333-215604
		FILM NUMBER:		17569373

	BUSINESS ADDRESS:	
		STREET 1:		131 S CLARK DR
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		6029675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
</SEC-HEADER>
<DOCUMENT>
<TYPE>S-3/A
<SEQUENCE>1
<FILENAME>asyss-3auniversal.htm
<DESCRIPTION>S-3/A
<TEXT>
Document 1 - file: asyss-3auniversal.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-4.9
<SEQUENCE>2
<FILENAME>exhibit49.htm
<DESCRIPTION>EXHIBIT 4.9
<TEXT>
Document 2 - file: exhibit49.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-5.1
<SEQUENCE>3
<FILENAME>exhibit51.htm
<DESCRIPTION>EXHIBIT 5.1
<TEXT>
Document 3 - file: exhibit51.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>4
<FILENAME>asyss3universa_image1.jpg
<TEXT>
Document 4 - file: asyss3universa_image1.jpg

</DOCUMENT>
</SEC-DOCUMENT>