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Deconsolidation (Details) - USD ($)
$ in Thousands
3 Months Ended 12 Months Ended
Jun. 30, 2016
Mar. 31, 2016
Sep. 30, 2016
Sep. 30, 2015
Sep. 30, 2014
Sep. 16, 2015
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]            
Gain on deconsolidation of Kingstone     $ 0 $ 8,814 $ 0  
Gain on sale     $ 2,576 0 $ 0  
Kingstone            
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]            
Gain on deconsolidation of Kingstone       $ 8,800    
Exclusive Sales and Service Rights in Solar Ion Implant Equipment            
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]            
Proceeds from license fees received   $ 4,900        
Gain on sale $ 2,600          
Kingstone Holding Company            
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]            
Ownership percentage       15.00%    
Kingstone Holding Company | Kingstone            
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]            
Ownership percentage           15.00%