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Acquisitions - Pro Forma (Details) - BTU International, Inc (BTU) Merger - USD ($)
$ / shares in Units, $ in Thousands
12 Months Ended
Sep. 30, 2015
Sep. 30, 2014
Business Acquisition, Pro Forma Information [Abstract]    
Revenue, net $ 121,186 $ 111,531
Net loss $ (9,223) $ (15,586)
Earnings per share available to Amtech stockholders:    
Basic (in dollars per share) $ (0.70) $ (1.21)
Diluted (in dollars per share) $ (0.70) $ (1.21)