For an unclassified balance sheet, amounts due from related parties including affiliates, employees, joint ventures, officers and stockholders, immediate families thereof, and pension funds.

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Related Party Transactions (Details) - USD ($) $ in Thousands	3 Months Ended		9 Months Ended
	Jun. 30, 2016	Mar. 31, 2016	Jun. 30, 2016	Jun. 30, 2015	Sep. 30, 2015
Related Party Transaction [Line Items]
Gain on sale of exclusive rights			$ 2,576	$ 0
Kingstone Holding Company
Related Party Transaction [Line Items]
Equity method investment, ownership percentage	15.00%		15.00%		15.00%
Accounts Receivable \| Kingstone Hong Kong
Related Party Transaction [Line Items]
Due from related parties	$ 300		$ 300
Exclusive Sales And Service Rights In Solar Ion Implant Equipment
Related Party Transaction [Line Items]
Proceeds from sale of exclusive rights		$ 4,900
Gain on sale of exclusive rights	$ 2,600