Condensed Consolidated Statements of Operations - USD ($) shares in Thousands, $ in Thousands	3 Months Ended		9 Months Ended
	Jun. 30, 2016	Jun. 30, 2015	Jun. 30, 2016	Jun. 30, 2015
Income Statement [Abstract]
Revenues, net of returns and allowances	$ 33,342	$ 40,016	$ 77,899	$ 76,685
Cost of sales	23,711	29,888	56,312	56,240
Gross profit	9,631	10,128	21,587	20,445
Selling, general and administrative	8,665	10,054	23,709	24,513
Research, development and engineering	1,568	1,308	6,015	3,894
Operating loss	(602)	(1,234)	(8,137)	(7,962)
Gain on sale of other assets	0	0	2,576	0
Income (loss) from equity method investment	(444)	0	227	0
Interest expense and other income, net	(265)	(15)	(434)	(135)
Loss before income taxes	(1,311)	(1,249)	(5,768)	(8,097)
Income tax provision	70	290	2,040	640
Net loss	(1,381)	(1,539)	(7,808)	(8,737)
Add: net loss (income) attributable to noncontrolling interest	172	(65)	1,086	(382)
Net loss attributable to Amtech Systems, Inc.	$ (1,209)	$ (1,604)	$ (6,722)	$ (9,119)
Loss Per Share:
Basic loss per share attributable to Amtech shareholders (dollars per share)	$ (0.09)	$ (0.12)	$ (0.51)	$ (0.78)
Weighted average shares outstanding (in shares)	13,173	13,103	13,165	11,644
Diluted loss per share attributable to Amtech shareholders (dollars per share)	$ (0.09)	$ (0.12)	$ (0.51)	$ (0.78)
Weighted average shares outstanding (in shares)	13,173	13,103	13,165	11,644