Commitments and Contingencies (Details) $ in Thousands		9 Months Ended		12 Months Ended
	Apr. 01, 2016 USD ($)	Jun. 30, 2016 USD ($) claims	Jun. 30, 2015 USD ($)	Sep. 30, 2014 USD ($)	Sep. 30, 2015 USD ($)
Schedule of Equity Method Investments [Line Items]
Purchase obligation		$ 15,800			$ 9,800
Price of an ion implanter		442	$ 511
Tempress Systems and Energy Research Centre Agreement
Schedule of Equity Method Investments [Line Items]
Price of an ion implanter				$ 1,400
Ownership rights to results of projects developed separately by individual parties				100.00%
R&D agreement term				4 years
Required contribution in form of labor and assets				$ 1,400
Period from agreement start for contribution for project support				2 years
R&D, required contribution		1,400
Environmental Clean-up | BTU International, Inc (BTU) Merger
Schedule of Equity Method Investments [Line Items]
Loss contingency accrual		100
Letter of credit		$ 200
Stockholder Actions (Putative Stockholder Class Action Complaints) | Settled Litigation
Schedule of Equity Method Investments [Line Items]
Number of settled claims | claims		2
Legal settlement, payment of fees and expenses	$ 325