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Long-term Debt (Details) - USD ($)
$ in Millions
9 Months Ended
Jun. 30, 2016
Jan. 30, 2015
Dec. 31, 2014
BTU International, Inc (BTU) Merger      
Debt Instrument [Line Items]      
Long-term debt acquired   $ 7.2  
SoLayTec, B.V.      
Debt Instrument [Line Items]      
Long-term debt acquired     $ 2.0
Long-term debt $ 3.7    
Proceeds from issuance of debt $ 1.1    
SoLayTec, B.V. | Minimum      
Debt Instrument [Line Items]      
Interest rate 5.95%    
SoLayTec, B.V. | Maximum      
Debt Instrument [Line Items]      
Interest rate 10.00%    
Mortgage Note | BTU International, Inc (BTU) Merger      
Debt Instrument [Line Items]      
Long-term debt $ 6.6    
Interest rate   4.40%  
Federal Home Loan Board Five Year Classic Advance Rate | Mortgage Note      
Debt Instrument [Line Items]      
Basis spread on variable rate 240.00%