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Business Segment Information (Details)
$ in Thousands
3 Months Ended 9 Months Ended
Jun. 30, 2016
USD ($)
Jun. 30, 2015
USD ($)
Jun. 30, 2016
USD ($)
segment
Jun. 30, 2015
USD ($)
Sep. 30, 2015
USD ($)
Dec. 24, 2014
Segment Reporting Information [Line Items]            
Number of business segments | segment     3      
Net revenues $ 33,342 $ 40,016 $ 77,899 $ 76,685    
Operating income (Loss) (602) (1,234) (8,137) (7,962)    
Identifiable assets 126,159   $ 126,159   $ 125,456  
Product Concentration Risk | Sales Revenue, Product Line | Semiconductor            
Segment Reporting Information [Line Items]            
Concentration risk, percentage (less than)     25.00%      
SoLayTec, B.V.            
Segment Reporting Information [Line Items]            
Percentage of voting interests acquired           51.00%
Operating Segments | Solar            
Segment Reporting Information [Line Items]            
Net revenues 19,001 24,392 $ 38,346 42,141    
Operating income (Loss) (402) 1,232 (4,532) (1,987)    
Identifiable assets 50,580   50,580   45,717  
Operating Segments | Semiconductor            
Segment Reporting Information [Line Items]            
Net revenues 12,200 12,945 33,406 25,765    
Operating income (Loss) 1,056 (1,113) 777 (483)    
Identifiable assets 47,874   47,874   46,912  
Operating Segments | Polishing            
Segment Reporting Information [Line Items]            
Net revenues 2,141 2,679 6,147 8,779    
Operating income (Loss) 343 574 899 1,917    
Identifiable assets 5,274   5,274   5,793  
Non-Segment            
Segment Reporting Information [Line Items]            
Operating income (Loss) (1,599) $ (1,927) (5,281) $ (7,409)    
Identifiable assets $ 22,431   $ 22,431   $ 27,034