Condensed Consolidated Statements of Operations (Unaudited) - USD ($) shares in Thousands, $ in Thousands	3 Months Ended		6 Months Ended
	Mar. 31, 2016	Mar. 31, 2015	Mar. 31, 2016	Mar. 31, 2015
Income Statement [Abstract]
Revenues, net of returns and allowances	$ 22,483	$ 24,273	$ 44,557	$ 36,669
Cost of sales	16,482	17,384	32,601	26,352
Gross profit	6,001	6,889	11,956	10,317
Selling, general and administrative	7,448	8,075	15,044	14,459
Research, development and engineering	2,160	750	4,447	2,586
Operating loss	(3,607)	(1,936)	(7,535)	(6,728)
Gain on sale of other assets	2,576	0	2,576	0
Income from equity method investment	688	0	671	0
Interest expense and other income, net	33	(217)	(169)	(120)
Loss before income taxes	(310)	(2,153)	(4,457)	(6,848)
Income tax provision	1,670	170	1,970	350
Net loss	(1,980)	(2,323)	(6,427)	(7,198)
Add: net loss (income) attributable to noncontrolling interest	481	2	914	(317)
Net loss attributable to Amtech Systems, Inc.	$ (1,499)	$ (2,321)	$ (5,513)	$ (7,515)
Loss Per Share:
Basic loss per share attributable to Amtech shareholders (dollars per share)	$ (0.11)	$ (0.19)	$ (0.42)	$ (0.69)
Weighted average shares outstanding (in shares)	13,169	11,997	13,161	10,914
Diluted loss per share attributable to Amtech shareholders (dollars per share)	$ (0.11)	$ (0.19)	$ (0.42)	$ (0.69)
Weighted average shares outstanding (in shares)	13,169	11,997	13,161	10,914