Commitments and Contingencies (Details)	3 Months Ended		12 Months Ended
	Dec. 31, 2015 USD ($) claims	Dec. 31, 2014 USD ($)	Sep. 30, 2014 USD ($)	Sep. 30, 2015 USD ($)	Jan. 30, 2015 USD ($)
Schedule of Equity Method Investments [Line Items]
Purchase obligation	$ 7,200,000			$ 9,800,000
Price of an ion implanter	$ 108,000	$ 155,000
Kingstone Holding Company
Schedule of Equity Method Investments [Line Items]
Equity method investment, ownership percentage	15.00%
Tempress Systems and Energy Research Centre Agreement [Member]
Schedule of Equity Method Investments [Line Items]
Price of an ion implanter			$ 1,400,000
Ownership rights to results of projects developed separately by individual parties			100.00%
R&D Agreement term			4 years
Required contribution in form of labor and assets			$ 1,400,000
Amount contributed	$ 900,000
R&D, required contribution	1,400,000
Number of years from agreement start for contribution for project support			2 years
Environmental Clean-up | BTU International, Inc (BTU) Merger
Schedule of Equity Method Investments [Line Items]
Loss contingency accrual					$ 100,000
Letter of credit	$ 200,000
Stockholder Actions (Putative Stockholder Class Action Complaints) | Settled Litigation
Schedule of Equity Method Investments [Line Items]
Number of settled claims | claims	2
Estimate of possible loss	$ 325,000