Condensed Consolidated Statements of Operations (Unaudited) - USD ($) shares in Thousands, $ in Thousands	3 Months Ended
	Dec. 31, 2015	Dec. 31, 2014
Income Statement [Abstract]
Revenues, net of returns and allowances	$ 22,074	$ 12,396
Cost of sales	16,119	8,968
Gross profit	5,955	3,428
Selling, general and administrative	7,596	6,384
Research, development and engineering	2,288	1,837
Operating loss	(3,929)	(4,793)
Interest expense and other income, net	(219)	97
Loss before income taxes	(4,148)	(4,696)
Income tax provision	300	180
Net loss	(4,448)	(4,876)
Add: net loss (income) attributable to noncontrolling interest	433	(319)
Net loss attributable to Amtech Systems, Inc.	$ (4,015)	$ (5,195)
Loss Per Share:
Basic loss per share attributable to Amtech shareholders (dollars per share)	$ (0.31)	$ (0.53)
Weighted average shares outstanding (in shares)	13,152	9,854
Diluted loss per share attributable to Amtech shareholders (dollars per share)	$ (0.31)	$ (0.53)
Weighted average shares outstanding (in shares)	13,152	9,854