Basis of Presentation - Goodwill (Details) $ in Thousands	3 Months Ended
	Dec. 31, 2015 USD ($)
Goodwill [Roll Forward]
Goodwill, gross, beginning of year	$ 11,808
Goodwill, impaired, accumulated impairment loss, beginning of year	(1,273)
Goodwill, net, beginning of year	10,535
Goodwill, Acquired During Period	600
Change in foreign exchange rates	(161)
Goodwill, gross, end of quarter	12,204
Goodwill, impaired, accumulated impairment loss, end of quarter	(1,230)
Goodwill, net, end of quarter	10,974
Solar (1)
Goodwill [Roll Forward]
Goodwill, gross, beginning of year	6,617
Goodwill, impaired, accumulated impairment loss, beginning of year	(1,273)
Goodwill, net, beginning of year	5,344
Goodwill, Acquired During Period	0
Change in foreign exchange rates	(161)
Goodwill, gross, end of quarter	6,413
Goodwill, impaired, accumulated impairment loss, end of quarter	(1,230)
Goodwill, net, end of quarter	5,183
Semiconductor
Goodwill [Roll Forward]
Goodwill, gross, beginning of year	4,463
Goodwill, impaired, accumulated impairment loss, beginning of year	0
Goodwill, net, beginning of year	4,463
Goodwill, Acquired During Period	600
Change in foreign exchange rates	0
Goodwill, gross, end of quarter	5,063
Goodwill, impaired, accumulated impairment loss, end of quarter	0
Goodwill, net, end of quarter	5,063
Polishing
Goodwill [Roll Forward]
Goodwill, gross, beginning of year	728
Goodwill, impaired, accumulated impairment loss, beginning of year	0
Goodwill, net, beginning of year	728
Goodwill, Acquired During Period	0
Change in foreign exchange rates	0
Goodwill, gross, end of quarter	728
Goodwill, impaired, accumulated impairment loss, end of quarter	0
Goodwill, net, end of quarter	$ 728