Consolidated Statements of Comprehensive Income Consolidated Statements of Comprehensive Income - USD ($) $ in Thousands	12 Months Ended
	Sep. 30, 2015	Sep. 30, 2014	Sep. 30, 2013
Statement of Comprehensive Income [Abstract]
Net loss	$ (6,717)	$ (14,289)	$ (21,707)
Foreign currency translation adjustment	(3,010)	(1,202)	2,225
Comprehensive loss	(9,727)	(15,491)	(19,482)
Comprehensive (income) loss attributable to noncontrolling interest	(920)	1,210	1,674
Comprehensive loss attributable to Amtech Systems, Inc.	$ (10,647)	$ (14,281)	$ (17,808)