Summary of Significant Accounting Policies (Goodwill) (Details) - USD ($) $ in Thousands	3 Months Ended	12 Months Ended
Sep. 30, 2015	Sep. 30, 2015
Goodwill [Roll Forward]
Goodwill, gross, beginning of year		$ 13,043
Goodwill, accumulated impairment loss, beginning of year		(4,720)
Goodwill, net, beginning of year		8,323
Goodwill recognized due to acquisitions		7,681
Goodwill derecognized due to deconsolidation		(5,198)
Exchange differences, net		(271)
Goodwill, gross, end of year	$ 15,090	15,090
Goodwill, accumulated impairment loss, end of year	(4,555)	(4,555)
Goodwill, net, end of year	10,535	10,535
Solar
Goodwill [Roll Forward]
Goodwill, gross, beginning of year		12,315
Goodwill, accumulated impairment loss, beginning of year		(4,720)
Goodwill, net, beginning of year		7,595
Goodwill recognized due to acquisitions		3,218
Exchange differences, net		(271)
Goodwill, gross, end of year	9,899	9,899
Goodwill, accumulated impairment loss, end of year	(4,555)	(4,555)
Goodwill, net, end of year	5,344	5,344
Semiconductor
Goodwill [Roll Forward]
Goodwill, gross, beginning of year		$ 0
Goodwill, accumulated impairment loss, beginning of year
Goodwill, net, beginning of year		$ 0
Goodwill recognized due to acquisitions		4,463
Goodwill derecognized due to deconsolidation		0
Exchange differences, net		0
Goodwill, gross, end of year	4,463	4,463
Goodwill, accumulated impairment loss, end of year	0	0
Goodwill, net, end of year	4,463	4,463
Polishing
Goodwill [Roll Forward]
Goodwill, gross, beginning of year		728
Goodwill, accumulated impairment loss, beginning of year		0
Goodwill, net, beginning of year		728
Goodwill recognized due to acquisitions		0
Goodwill derecognized due to deconsolidation		0
Exchange differences, net		0
Goodwill, gross, end of year	728	728
Goodwill, accumulated impairment loss, end of year	0	0
Goodwill, net, end of year	728	$ 728
SoLayTec, B.V.
Segment Reporting Information [Line Items]
Goodwill, Increase (Decrease)	900
BTU International, Inc (BTU)
Segment Reporting Information [Line Items]
Goodwill, Increase (Decrease)	$ (200)

Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.

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-Publisher FASB

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