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Earnings Per Share (Tables)
 12 Months Ended
Sep. 30, 2015
Earnings Per Share [Abstract]  
Schedule of Earnings Per Share, Basic and Diluted
 
Years ended September 30,
 
2015
 
2014
 
2013
 
(dollars in thousands, except per share amounts)
Basic Earnings Per Share Computation
 
 
Net loss attributable to Amtech Systems, Inc.
$
(7,771
)
 
$
(13,047
)
 
$
(20,069
)
Weighted Average Shares Outstanding:
 
 
 
 
 
Common stock
12,022

 
9,732

 
9,529

Basic loss per share attributable to Amtech shareholders
$
(0.65
)
 
$
(1.34
)
 
$
(2.11
)
Diluted Earnings Per Share Computation
 
 
 
 
 
Net loss attributable to Amtech Systems, Inc.
$
(7,771
)
 
$
(13,047
)
 
$
(20,069
)
Weighted Average Shares Outstanding:
 
 
 
 
 
Common stock
12,022

 
9,732

 
9,529

Common stock equivalents (1)
—

 
—

 
—

Diluted shares
12,022

 
9,732

 
9,529

Diluted loss per share attributable to Amtech shareholders
$
(0.65
)
 
$
(1.34
)
 
$
(2.11
)

(1) The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.