Condensed Consolidated Statements Of Comprehensive Income (Loss) (Unaudited) - USD ($) $ in Thousands	3 Months Ended		9 Months Ended
	Jun. 30, 2015	Jun. 30, 2014	Jun. 30, 2015	Jun. 30, 2014
Statement of Comprehensive Income [Abstract]
Net loss	$ (1,539)	$ (5,153)	$ (8,737)	$ (10,639)
Foreign currency translation adjustment	213	(335)	(3,168)	406
Comprehensive loss	(1,326)	(5,488)	(11,905)	(10,233)
Comprehensive (income) loss attributable to noncontrolling interest	(18)	(80)	(157)	844
Comprehensive loss attributable to Amtech Systems, Inc.	$ (1,344)	$ (5,568)	$ (12,062)	$ (9,389)