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Acquisition - Assets Acquired and Liabilities Assumed (Details) - USD ($)
$ in Thousands
3 Months Ended 9 Months Ended
Jun. 30, 2015
Jun. 30, 2015
Jun. 30, 2014
Jan. 30, 2015
Sep. 30, 2014
Business Acquisition [Line Items]          
Goodwill $ 15,043 $ 15,043     $ 8,323
Goodwill recognized due to acquisitions   7,021      
BTU International, Inc (BTU) Merger          
Business Acquisition [Line Items]          
Fair value of net tangible assets acquired       $ 20,598  
Goodwill       4,697  
Identifiable intangible assets       1,330  
Total consideration allocated       $ 26,625  
Transaction-related costs   1,800 $ 200    
Semiconductor          
Business Acquisition [Line Items]          
Goodwill $ 4,697 4,697     $ 0
Goodwill recognized due to acquisitions   4,697      
Semiconductor | BTU International, Inc (BTU) Merger          
Business Acquisition [Line Items]          
Goodwill recognized due to acquisitions   $ 4,700      
Trade names          
Business Acquisition [Line Items]          
Useful Life (in years)   15 years      
Trade names | BTU International, Inc (BTU) Merger          
Business Acquisition [Line Items]          
Useful Life (in years)   15 years