Commitments and Contingencies (Details) - USD ($) $ in Thousands	9 Months Ended
	Jun. 30, 2015	Jun. 30, 2014	Jan. 30, 2015	Sep. 30, 2014
Schedule of Equity Method Investments [Line Items]
Purchase obligation	$ 14,100			$ 7,900
Price of an ion implanter	511	$ 214
Revenue from Grants	4,100
Grant revenue commitment to the project	$ 6,100
Kingstone Holding Company
Schedule of Equity Method Investments [Line Items]
Equity method investment, ownership percentage	55.00%
Kingstone Semiconductor Company Ltd
Schedule of Equity Method Investments [Line Items]
Percentage of voting interest of acquiree owned subsidiary	100.00%
Tempress Systems and Energy Research Centre Agreement [Member]
Schedule of Equity Method Investments [Line Items]
Price of an ion implanter	$ 1,400
Ownership rights to results of projects developed separately by individual parties	100.00%
R&D Agreement term	4 years
Required contribution in form of labor and assets	$ 1,400
Number of years from agreement start for contribution for project support	2 years
Environmental Clean-up | BTU International, Inc (BTU) Merger
Schedule of Equity Method Investments [Line Items]
Loss contingency accrual	$ 100		$ 200
Letter of credit	$ 200