Condensed Consolidated Statements of Operations (Unaudited) - USD ($) shares in Thousands, $ in Thousands	3 Months Ended		9 Months Ended
	Jun. 30, 2015	Jun. 30, 2014	Jun. 30, 2015	Jun. 30, 2014
Income Statement [Abstract]
Revenues, net of returns and allowances	$ 40,016	$ 9,190	$ 76,685	$ 36,678
Cost of sales	29,888	7,559	56,240	27,615
Gross profit	10,128	1,631	20,445	9,063
Selling, general and administrative	10,054	4,103	24,513	13,504
Research, development and engineering	1,308	1,399	3,894	4,443
Operating loss	(1,234)	(3,871)	(7,962)	(8,884)
Interest expense and other income, net	(15)	43	(135)	130
Loss before income taxes	(1,249)	(3,828)	(8,097)	(8,754)
Income tax provision	290	1,325	640	1,885
Net loss	(1,539)	(5,153)	(8,737)	(10,639)
Add: net loss (income) attributable to noncontrolling interest	(65)	(104)	(382)	837
Net loss attributable to Amtech Systems, Inc.	$ (1,604)	$ (5,257)	$ (9,119)	$ (9,802)
Loss Per Share:
Basic loss per share attributable to Amtech shareholders (dollars per share)	$ (0.12)	$ (0.53)	$ (0.78)	$ (1.01)
Weighted average shares outstanding (in shares)	13,103	9,843	11,644	9,694
Diluted loss per share attributable to Amtech shareholders (dollars per share)	$ (0.12)	$ (0.53)	$ (0.78)	$ (1.01)
Weighted average shares outstanding (in shares)	13,103	9,843	11,644	9,694