Basis of Presentation - Goodwill (Details) $ in Thousands	9 Months Ended
	Jun. 30, 2015 USD ($)
Goodwill [Roll Forward]
Goodwill, gross, beginning of year	$ 13,043
Goodwill, impaired, accumulated impairment loss, beginning of year	(4,720)
Goodwill, net, beginning of year	8,323
Goodwill recognized due to acquisitions	7,021
Change in foreign exchange rates	(301)
Goodwill, gross, end of quarter	19,580
Goodwill, impaired, accumulated impairment loss, end of quarter	(4,537)
Goodwill, net, end of quarter	15,043
Solar
Goodwill [Roll Forward]
Goodwill, gross, beginning of year	12,315
Goodwill, impaired, accumulated impairment loss, beginning of year	(4,720)
Goodwill, net, beginning of year	7,595
Goodwill recognized due to acquisitions	2,324
Change in foreign exchange rates	(301)
Goodwill, gross, end of quarter	14,155
Goodwill, impaired, accumulated impairment loss, end of quarter	(4,537)
Goodwill, net, end of quarter	9,618
Semiconductor
Goodwill [Roll Forward]
Goodwill, gross, beginning of year	0
Goodwill, impaired, accumulated impairment loss, beginning of year	0
Goodwill, net, beginning of year	0
Goodwill recognized due to acquisitions	4,697
Change in foreign exchange rates	0
Goodwill, gross, end of quarter	4,697
Goodwill, impaired, accumulated impairment loss, end of quarter	0
Goodwill, net, end of quarter	4,697
Polishing
Goodwill [Roll Forward]
Goodwill, gross, beginning of year	728
Goodwill, impaired, accumulated impairment loss, beginning of year	0
Goodwill, net, beginning of year	728
Goodwill recognized due to acquisitions	0
Change in foreign exchange rates	0
Goodwill, gross, end of quarter	728
Goodwill, impaired, accumulated impairment loss, end of quarter	0
Goodwill, net, end of quarter	$ 728