Earnings Per Share (Tables)

9 Months Ended

Jun. 30, 2015

Earnings Per Share [Abstract]

Schedule of Earnings Per Share, Basic and Diluted

The following table outlines basic and diluted EPS:

	Three Months Ended June 30,						Nine Months Ended June 30,
	2015			2014			2015			2014
	(in thousands, except per share amounts)						(in thousands, except per share amounts)
Basic Loss Per Share Computation
Net loss attributable to Amtech Systems, Inc.	$	(1,604	)	$	(5,257	)	$	(9,119	)	$	(9,802	)
Weighted Average Shares Outstanding:
Common stock	13,103			9,843			11,644			9,694
Basic loss per share attributable to Amtech shareholders	$	(0.12	)	$	(0.53	)	$	(0.78	)	$	(1.01	)
Diluted Loss Per Share Computation
Net loss attributable to Amtech Systems, Inc.	$	(1,604	)	$	(5,257	)	$	(9,119	)	$	(9,802	)
Weighted Average Shares Outstanding:
Common stock	13,103			9,843			11,644			9,694
Common stock equivalents (1)	—			—			—			—
Diluted shares	13,103			9,843			11,644			9,694
Diluted loss per share attributable to Amtech shareholders	$	(0.12	)	$	(0.53	)	$	(0.78	)	$	(1.01	)

(1) The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.