Condensed Consolidated Statements Of Cash Flows (Unaudited) (USD $) In Thousands, unless otherwise specified	3 Months Ended
Dec. 31, 2014	Dec. 31, 2013
Operating Activities
Net loss	$ (4,876)us-gaap_ProfitLoss	$ (932)us-gaap_ProfitLoss
Adjustments to reconcile net loss to net cash provided by (used in) operating activities:
Depreciation and amortization	705	623
Write-down of inventory	35us-gaap_InventoryWriteDown	90us-gaap_InventoryWriteDown
Deferred income taxes	(4)	0
Non-cash share based compensation expense	232us-gaap_ShareBasedCompensation	176us-gaap_ShareBasedCompensation
Provision for allowance for doubtful accounts	44us-gaap_ProvisionForDoubtfulAccounts	33us-gaap_ProvisionForDoubtfulAccounts
Changes in operating assets and liabilities:
Restricted cash	(244)	944
Accounts receivable	2,371	(9,748)
Inventories	(535)us-gaap_IncreaseDecreaseInInventories	5,498us-gaap_IncreaseDecreaseInInventories
Income taxes refundable and payable, net	172	532
Prepaid expenses and other assets	(722)	1,078
Accounts payable	(429)	(237)
Accrued liabilities and customer deposits	6,407	(8,534)
Deferred profit	(1,259)asys_IncreaseDecreaseInDeferredProfit	3,554asys_IncreaseDecreaseInDeferredProfit
Net cash provided by (used in) operating activities	1,897	(6,923)
Investing Activities
Purchases of property, plant and equipment	(155)	(154)
Investment in acquisition, net of cash	253	0
Net cash used in investing activities	(408)	(154)
Financing Activities
Proceeds from the exercise of stock options	0	9
Net cash provided by financing activities	0	9
Effect of Exchange Rate Changes on Cash	(302)	208
Net Increase (Decrease) in Cash and Cash Equivalents	1,187	(6,860)
Cash and Cash Equivalents, Beginning of Period	27,367	37,197
Cash and Cash Equivalents, End of Period	$ 28,554	$ 30,337

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Amount of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Excludes cash and cash equivalents within disposal group and discontinued operation.

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Amount of increase (decrease) in cash and cash equivalents. Cash and cash equivalents are the amount of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Includes effect from exchange rate changes.

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Amount of increase (decrease) from the effect of exchange rate changes on cash and cash equivalent balances held in foreign currencies.

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The increase (decrease) during the reporting period in the aggregate amount of liabilities incurred (and for which invoices have typically been received) and payable to vendors for goods and services received that are used in an entity's business.

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The increase (decrease) during the period in the amount due for taxes based on the reporting entity's earnings or attributable to the entity's income earning process (business presence) within a given jurisdiction.

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Charge to cost of goods sold that represents the reduction of the carrying amount of inventory, generally attributable to obsolescence or market conditions.

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Amount of cash inflow (outflow) from financing activities, including discontinued operations. Financing activity cash flows include obtaining resources from owners and providing them with a return on, and a return of, their investment; borrowing money and repaying amounts borrowed, or settling the obligation; and obtaining and paying for other resources obtained from creditors on long-term credit.

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Amount of cash inflow (outflow) from investing activities, including discontinued operations. Investing activity cash flows include making and collecting loans and acquiring and disposing of debt or equity instruments and property, plant, and equipment and other productive assets.

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The cash outflow associated with the acquisition of a business, net of the cash acquired from the purchase.

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The cash outflow associated with the acquisition of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale; includes cash outflows to pay for construction of self-constructed assets.

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The cash inflow from the additional capital contribution to the entity.

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