Grant Revenue Commitment to Project

No definition available.

Name:	asys_GrantRevenueCommitmenttoProject
Namespace Prefix:	asys_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Ownership Rights, Results of Projects Developed Separately By Individual Parties

+ References

No definition available.

+ Details

Name:	asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties
Namespace Prefix:	asys_
Data Type:	num:percentItemType
Balance Type:	na
Period Type:	duration

- Definition

Percentage of Voting Interest of Acquiree Owned Subsidiary

+ References

No definition available.

+ Details

Name:	asys_PercentageofVotingInterestofAcquireeOwnedSubsidiary
Namespace Prefix:	asys_
Data Type:	num:percentItemType
Balance Type:	na
Period Type:	instant

- Definition

Research and Development Agreement Term

+ References

No definition available.

+ Details

Name:	asys_ResearchandDevelopmentAgreementTerm
Namespace Prefix:	asys_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	duration

- Definition

Research and Development, Period Required for Equipment Repairs and Maintenance

+ References

No definition available.

+ Details

Name:	asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance
Namespace Prefix:	asys_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	duration

- Definition

Research and Development, Required Contribution, Labor and Assets

+ References

No definition available.

+ Details

Name:	asys_ResearchandDevelopmentRequiredContributionLaborandAssets
Namespace Prefix:	asys_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

The percentage of ownership of common stock or equity participation in the investee accounted for under the equity method of accounting.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 323

-SubTopic 10

-Section 50

-Paragraph 3

-Subparagraph (a)(1)

-URI http://asc.fasb.org/extlink&oid=6382943&loc=d3e33918-111571

+ Details

Name:	us-gaap_EquityMethodInvestmentOwnershipPercentage
Namespace Prefix:	us-gaap_
Data Type:	num:percentItemType
Balance Type:	na
Period Type:	instant

- Definition

The cash outflow associated with the acquisition of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale; includes cash outflows to pay for construction of self-constructed assets.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Glossary Investing Activities

-URI http://asc.fasb.org/extlink&oid=6516133

Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 230

-SubTopic 10

-Section 45

-Paragraph 13

-Subparagraph (c)

-URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3213-108585

+ Details

Name:	us-gaap_PaymentsToAcquirePropertyPlantAndEquipment
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

Minimum amount of purchase arrangement in which the entity has agreed to expend funds to procure goods or services from a supplier.

+ References

No definition available.

+ Details

Name:	us-gaap_PurchaseObligation
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Revenue earned during the period from non-repayable sum of money awarded to an entity to carry out a specific purpose as provided in grant agreements.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 225

-SubTopic 10

-Section S99

-Paragraph 2

-Subparagraph (SX 210.5-03.1(e))

-URI http://asc.fasb.org/extlink&oid=26872669&loc=d3e20235-122688

+ Details

Name:	us-gaap_RevenueFromGrants
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Details

Name:	us-gaap_ScheduleOfEquityMethodInvestmentsLineItems
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Details

Name:	us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis=asys_TempressSystemsandEnergyResearchCentreAgreementMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=asys_KingstoneHoldingCompanyMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=asys_KingstoneSemiconductorCompanyLtdMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

Commitments and Contingencies (Details) (USD $)	3 Months Ended
Commitments and Contingencies (Details) (USD $)	Dec. 31, 2014	Dec. 31, 2013	Sep. 30, 2014
Schedule of Equity Method Investments [Line Items]
Purchase obligation	$ 15,000,000us-gaap_PurchaseObligation		$ 7,900,000us-gaap_PurchaseObligation
Price of an ion implanter	155,000	154,000
Revenue from Grants	3,600,000us-gaap_RevenueFromGrants
Grant revenue commitment to the project, by July 2014	6,100,000asys_GrantRevenueCommitmenttoProject
Kingstone Holding Company [Member]
Schedule of Equity Method Investments [Line Items]
Equity method investment, ownership percentage	55.00%
Kingstone Semiconductor Company Ltd [Member]
Schedule of Equity Method Investments [Line Items]
Percentage of voting interest of acquiree owned subsidiary	100.00%
Tempress Systems and Energy Research Centre Agreement [Member]
Schedule of Equity Method Investments [Line Items]
Price of an ion implanter	1,400,000
Ownership rights to results of projects developed separately by individual parties	100.00%
R&D Agreement term	4 years
Required contribution in form of labor and assets	$ 1,400,000
Number of years from agreement start for contribution for project support	2 years