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Business Segment Information (Details) (USD $) In Thousands, unless otherwise specified	3 Months Ended
	Dec. 31, 2014 segment	Dec. 31, 2013	Sep. 30, 2014
Segment Reporting Information [Line Items]
Number of business segments	2us-gaap_NumberOfOperatingSegments
Net Revenues	$ 12,396us-gaap_SalesRevenueNet	$ 14,772us-gaap_SalesRevenueNet
Operating Income (Loss)	(4,793)us-gaap_OperatingIncomeLoss	(478)us-gaap_OperatingIncomeLoss
Identifiable Assets	97,523us-gaap_Assets		89,904us-gaap_Assets
Solar and semiconductor equipment
Segment Reporting Information [Line Items]
Net Revenues	9,018	12,564
Operating Income (Loss)	(2,595)	349
Identifiable Assets	91,507		83,651
Polishing supplies and equipment
Segment Reporting Information [Line Items]
Net Revenues	3,378	2,208
Operating Income (Loss)	742	418
Identifiable Assets	6,016		6,253
Non-segment related
Segment Reporting Information [Line Items]
Operating Income (Loss)	$ (2,940)	$ (1,245)