Acquisition	3 Months Ended
Dec. 31, 2014
Business Combinations [Abstract]
Acquisition	Acquisition On December 24, 2014, the Company expanded our participation in the solar market by acquiring a 51% controlling interest in SoLayTec, B.V., which provides atomic layer deposition (ALD) systems used in high efficiency solar cells, for total purchase price consideration of $1.9 million. As of December 31, 2014, the accounting for the SoLayTec acquisition has not been finalized due to pending items on the valuation of acquired assets and liabilities. Based on a preliminary assessment, the Company recorded $5.0 million in intangible assets as of December 31, 2014. Transaction costs in connection with our acquisition of SoLayTec were not material to our quarter ended December 31, 2014. The Company consolidated the results of operations for SoLayTec beginning on December 24, 2014, the effective date of the acquisition, which were not material to our consolidated statement of operations for the three months ended December 31, 2014. Additionally, the Company's historical results would not have been materially affected by the acquisition of SoLayTec and, accordingly, has not presented pro forma information as if the acquisition had been completed at the beginning of each period presented in our consolidated statements of operations.

Acquisition

3 Months Ended

Dec. 31, 2014

On December 24, 2014, the Company expanded our participation in the solar market by acquiring a 51% controlling interest in SoLayTec, B.V., which provides atomic layer deposition (ALD) systems used in high efficiency solar cells, for total purchase price consideration of $1.9 million.

As of December 31, 2014, the accounting for the SoLayTec acquisition has not been finalized due to pending items on the valuation of acquired assets and liabilities. Based on a preliminary assessment, the Company recorded $5.0 million in intangible assets as of December 31, 2014. Transaction costs in connection with our acquisition of SoLayTec were not material to our quarter ended December 31, 2014.

The Company consolidated the results of operations for SoLayTec beginning on December 24, 2014, the effective date of the acquisition, which were not material to our consolidated statement of operations for the three months ended December 31, 2014. Additionally, the Company's historical results would not have been materially affected by the acquisition of SoLayTec and, accordingly, has not presented pro forma information as if the acquisition had been completed at the beginning of each period presented in our consolidated statements of operations.