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Earnings Per Share (Tables)
 12 Months Ended
Sep. 30, 2014
Earnings Per Share [Abstract]  
Schedule of Earnings Per Share, Basic and Diluted
 
Years ended September 30,
 
2014
 
2013
 
2012
 
(dollars in thousands, except per share amounts)
Basic Earnings Per Share Computation
 
 
Net loss attributable to Amtech Systems, Inc.
$
(13,047
)
 
$
(20,069
)
 
$
(23,031
)
Weighted Average Shares Outstanding:
 
 
 
 
 
Common stock
9,732

 
9,529

 
9,471

Basic loss per share attributable to Amtech shareholders
$
(1.34
)
 
$
(2.11
)
 
$
(2.43
)
Diluted Earnings Per Share Computation
 
 
 
 
 
Net loss attributable to Amtech Systems, Inc.
$
(13,047
)
 
$
(20,069
)
 
$
(23,031
)
Weighted Average Shares Outstanding:
 
 
 
 
 
Common stock
9,732

 
9,529

 
9,471

Common stock equivalents (1)
—

 
—

 


Diluted shares
9,732

 
9,529

 
9,471

Diluted loss per share attributable to Amtech shareholders
$
(1.34
)
 
$
(2.11
)
 
$
(2.43
)

(1) The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.