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Selected Quarterly Data (Unaudited)
 12 Months Ended
Sep. 30, 2014
Selected Quarterly Data (Unaudited) [Abstract]  
Selected Quarterly Data (Unaudited)
Selected Quarterly Data (Unaudited)
 
 
First Quarter
 
Second Quarter
 
Third Quarter
 
Fourth Quarter
Fiscal Year 2014:
(in thousands, except per share amounts)
Revenue
$
14,772

 
$
12,717

 
$
9,190

 
$
19,822

Gross margin
$
4,535

 
$
2,898

 
$
1,631

 
$
2,562

Provision for income taxes
$
560

 
$
—

 
$
1,325

 
$
(645
)
Net loss attributable to Amtech Systems, Inc.
$
(794
)
 
$
(3,751
)
 
$
(5,257
)
 
$
(3,245
)
Comprehensive loss attributable to Amtech Systems, Inc.
$
(66
)
 
$
(3,756
)
 
$
(5,568
)
 
$
(4,892
)
Net loss per share attributable to Amtech Systems, Inc.:
 
 
 
 
 
 
 
Basic earnings per share
$
(0.08
)
 
$
(0.39
)
 
$
(0.53
)
 
$
(0.33
)
Shares used in calculation
9,560

 
9,679

 
9,843

 
9,846

Diluted earnings per share
$
(0.08
)
 
$
(0.39
)
 
$
(0.53
)
 
$
(0.33
)
Shares used in calculation
9,560

 
9,679

 
9,843

 
9,846

 
 
 
 
 
 
 
 
Fiscal Year 2013:
 
Revenue
$
9,357

 
$
8,118

 
$
10,398

 
$
6,925

Gross margin
$
1,378

 
$
2,453

 
$
(2,677
)
 
$
3,159

Provision for income taxes
$
(480
)
 
$
(800
)
 
$
2,560

 
$
580

Net loss attributable to Amtech Systems, Inc.
$
(4,194
)
 
$
(2,092
)
 
$
(12,101
)
 
$
(1,682
)
Comprehensive loss attributable to Amtech Systems, Inc.
$
(2,791
)
 
$
(3,555
)
 
$
(11,387
)
 
$
(75
)
Net loss per share attributable to Amtech Systems, Inc.:
 
 
 
 
 
 
 
Basic earnings per share
$
(0.44
)
 
$
(0.22
)
 
$
(1.27
)
 
$
(0.18
)
Shares used in calculation
9,494

 
9,539

 
9,539

 
9,543

Diluted earnings per share
$
(0.44
)
 
$
(0.22
)
 
$
(1.27
)
 
$
(0.18
)
Shares used in calculation
9,494

 
9,539

 
9,539

 
9,543