Condensed Consolidated Statements of Operations (Unaudited) (USD $) In Thousands, except Per Share data, unless otherwise specified	3 Months Ended		9 Months Ended
	Jun. 30, 2014	Jun. 30, 2013	Jun. 30, 2014	Jun. 30, 2013
Income Statement [Abstract]
Revenues, net of returns and allowances	$ 9,190	$ 10,398	$ 36,678	$ 27,873
Cost of sales	7,453	8,648	27,416	22,639
Write-down of inventory	106	4,427	199	4,080
Gross profit (loss)	1,631	(2,677)	9,063	1,154
Selling, general and administrative	4,103	5,443	13,504	13,682
Restructuring charges	0	182	0	879
Research and development	1,399	1,947	4,443	5,055
Operating loss	(3,871)	(10,249)	(8,884)	(18,462)
Interest and other income, net	43	143	130	187
Loss before income taxes	(3,828)	(10,106)	(8,754)	(18,275)
Income tax provision	1,325	2,560	1,885	1,280
Net loss	(5,153)	(12,666)	(10,639)	(19,555)
Add: net loss (income) attributable to noncontrolling interest	(104)	565	837	1,169
Net loss attributable to Amtech Systems, Inc.	$ (5,257)	$ (12,101)	$ (9,802)	$ (18,386)
Loss Per Share:
Basic loss per share attributable to Amtech shareholders (dollars per share)	$ (0.53)	$ (1.27)	$ (1.01)	$ (1.93)
Weighted average shares outstanding (in shares)	9,843	9,539	9,694	9,524
Diluted loss per share attributable to Amtech shareholders (dollars per share)	$ (0.53)	$ (1.27)	$ (1.01)	$ (1.93)
Weighted average shares outstanding (in shares)	9,843	9,539	9,694	9,524