Condensed Consolidated Statements Of Comprehensive Income (Loss) (Unaudited) (USD $) In Thousands, unless otherwise specified	3 Months Ended		6 Months Ended
	Mar. 31, 2014	Mar. 31, 2013	Mar. 31, 2014	Mar. 31, 2013
Statement of Comprehensive Income [Abstract]
Net loss	$ (4,554)	$ (2,622)	$ (5,486)	$ (6,888)
Foreign currency translation adjustment	36	(1,468)	741	(77)
Comprehensive loss	(4,518)	(4,090)	(4,745)	(6,965)
Comprehensive loss attributable to noncontrolling interest	762	535	923	620
Comprehensive loss attributable to Amtech Systems, Inc.	$ (3,756)	$ (3,555)	$ (3,822)	$ (6,345)