Condensed Consolidated Statements of Operations (Unaudited) (USD $) In Thousands, except Per Share data, unless otherwise specified	3 Months Ended		6 Months Ended
	Mar. 31, 2014	Mar. 31, 2013	Mar. 31, 2014	Mar. 31, 2013
Income Statement [Abstract]
Revenues, net of returns and allowances	$ 12,717	$ 8,118	$ 27,488	$ 17,475
Cost of sales	9,819	5,665	20,055	13,644
Gross profit	2,898	2,453	7,433	3,831
Selling, general and administrative	5,277	3,968	9,402	8,238
Restructuring charges	0	0	0	697
Research and development	2,155	1,946	3,044	3,108
Operating loss	(4,534)	(3,461)	(5,013)	(8,212)
Interest and other income (loss), net	(20)	39	87	44
Loss before income taxes	(4,554)	(3,422)	(4,926)	(8,168)
Income tax provision (benefit)	0	(800)	560	(1,280)
Net loss	(4,554)	(2,622)	(5,486)	(6,888)
Add: net loss attributable to noncontrolling interest	803	530	941	603
Net loss attributable to Amtech Systems, Inc.	$ (3,751)	$ (2,092)	$ (4,545)	$ (6,285)
Loss Per Share:
Basic loss per share attributable to Amtech shareholders (dollars per share)	$ (0.39)	$ (0.22)	$ (0.47)	$ (0.66)
Weighted average shares outstanding (in shares)	9,679	9,539	9,619	9,516
Diluted loss per share attributable to Amtech shareholders (dollars per share)	$ (0.39)	$ (0.22)	$ (0.47)	$ (0.66)
Weighted average shares outstanding (in shares)	9,679	9,539	9,619	9,516