Business Segment Information (Details) (USD $) In Thousands, unless otherwise specified	3 Months Ended		6 Months Ended
	Mar. 31, 2014	Mar. 31, 2013	Mar. 31, 2014 segment	Mar. 31, 2013	Sep. 30, 2013
Segment Reporting Information [Line Items]
Number of business segments			2
Net Revenues	$ 12,717	$ 8,118	$ 27,488	$ 17,475
Operating Income (Loss)	(4,534)	(3,461)	(5,013)	(8,212)
Identifiable Assets	101,669		101,669		110,947
Solar and semiconductor equipment
Segment Reporting Information [Line Items]
Net Revenues	10,288	6,187	22,851	13,222
Operating Income (Loss)	(3,926)	(2,384)	(3,578)	(5,551)
Identifiable Assets	96,398		96,398		106,723
Polishing supplies and equipment
Segment Reporting Information [Line Items]
Net Revenues	2,429	1,931	4,637	4,253
Operating Income (Loss)	550	378	968	532
Identifiable Assets	5,271		5,271		4,224
Non-segment related
Segment Reporting Information [Line Items]
Operating Income (Loss)	$ (1,158)	$ (1,455)	$ (2,403)	$ (3,193)