Basis of Presentation - Goodwill (Details) (USD $) In Thousands, unless otherwise specified	6 Months Ended
	Mar. 31, 2014
Goodwill [Roll Forward]
Goodwill, gross, beginning of year	$ 13,291
Goodwill, impaired, accumulated impairment loss, beginning of year	(4,810)
Goodwill, net, beginning of year	8,481
Change in foreign exchange rates	44
Goodwill, gross, end of quarter	13,335
Goodwill, impaired, accumulated impairment loss, end of quarter	(4,810)
Goodwill, net, end of quarter	8,525
Solar and semiconductor equipment
Goodwill [Roll Forward]
Goodwill, gross, beginning of year	12,563
Goodwill, impaired, accumulated impairment loss, beginning of year	(4,810)
Goodwill, net, beginning of year	7,753
Change in foreign exchange rates	44
Goodwill, gross, end of quarter	12,607
Goodwill, impaired, accumulated impairment loss, end of quarter	(4,810)
Goodwill, net, end of quarter	7,797
Polishing supplies and equipment
Goodwill [Roll Forward]
Goodwill, gross, beginning of year	728
Goodwill, impaired, accumulated impairment loss, beginning of year	0
Goodwill, net, beginning of year	728
Change in foreign exchange rates	0
Goodwill, gross, end of quarter	728
Goodwill, impaired, accumulated impairment loss, end of quarter	0
Goodwill, net, end of quarter	$ 728