Earnings Per Share (Tables)

6 Months Ended

Mar. 31, 2014

Earnings Per Share [Abstract]

Schedule of Earnings Per Share, Basic and Diluted

	Three Months Ended March 31,						Six Months Ended March 31,
	2014			2013			2014			2013
	(in thousands, except per share amounts)						(in thousands, except per share amounts)
Basic Loss Per Share Computation
Net loss attributable to Amtech Systems, Inc.	$	(3,751	)	$	(2,092	)	$	(4,545	)	$	(6,285	)
Weighted Average Shares Outstanding:
Common stock	9,679			9,539			9,619			9,516
Basic loss per share attributable to Amtech shareholders	$	(0.39	)	$	(0.22	)	$	(0.47	)	$	(0.66	)
Diluted Loss Per Share Computation
Net loss attributable to Amtech Systems, Inc.	$	(3,751	)	$	(2,092	)	$	(4,545	)	$	(6,285	)
Weighted Average Shares Outstanding:
Common stock	9,679			9,539			9,619			9,516
Common stock equivalents (1)	—			—			—			—
Diluted shares	9,679			9,539			9,619			9,516
Diluted loss per share attributable to Amtech shareholders	$	(0.39	)	$	(0.22	)	$	(0.47	)	$	(0.66	)

(1) The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.