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Condensed Consolidated Statements Of Comprehensive Income (Loss) (Unaudited) (USD $)
In Thousands, unless otherwise specified
3 Months Ended
Dec. 31, 2013
Dec. 31, 2012
Statement of Other Comprehensive Income [Abstract]    
Net loss $ (932) $ (4,268)
Foreign currency translation adjustment 705 1,391
Comprehensive loss (227) (2,877)
Comprehensive loss attributable to noncontrolling interest 161 86
Comprehensive loss attributable to Amtech Systems, Inc. $ (66) $ (2,791)