Basis of Presentation - Goodwill (Details) (USD $) In Thousands, unless otherwise specified	3 Months Ended
	Dec. 31, 2013
Goodwill [Roll Forward]
Goodwill, gross, beginning of year	$ 13,291
Goodwill, gross, end of year	13,363
Goodwill, impaired, accumulated impairment loss, beginning of year	(4,810)
Goodwill, impaired, accumulated impairment loss, end of year	(4,836)
Change in foreign exchange rates	46
Goodwill, net, beginning of year	8,481
Goodwill, net, end of year	8,527
Solar and semiconductor equipment
Goodwill [Roll Forward]
Goodwill, gross, beginning of year	12,563
Goodwill, gross, end of year	12,635
Goodwill, impaired, accumulated impairment loss, beginning of year	(4,810)
Goodwill, impaired, accumulated impairment loss, end of year	(4,836)
Change in foreign exchange rates	46
Goodwill, net, beginning of year	7,753
Goodwill, net, end of year	7,799
Polishing supplies and equipment
Goodwill [Roll Forward]
Goodwill, gross, beginning of year	728
Goodwill, gross, end of year	728
Goodwill, impaired, accumulated impairment loss, beginning of year	0
Goodwill, impaired, accumulated impairment loss, end of year	0
Change in foreign exchange rates	0
Goodwill, net, beginning of year	728
Goodwill, net, end of year	$ 728