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Consolidated Statements of Comprehensive Income Statement (USD $)
In Thousands, unless otherwise specified
12 Months Ended
Sep. 30, 2013
Sep. 30, 2012
Sep. 30, 2011
Statement of Other Comprehensive Income [Abstract]      
Net income (loss) $ (21,707) $ (27,598) $ 22,119
Foreign currency translation adjustment 2,225 (4,853) (1,136)
Comprehensive income (loss) (19,482) (32,451) 20,983
Comprehensive loss attributable to noncontrolling interest 1,674 4,681 803
Comprehensive income (loss) attributable to Amtech Systems, Inc. $ (17,808) $ (27,770) $ 21,786