Selected Quarterly Data (unaudited) (Tables)

12 Months Ended

Sep. 30, 2013

Selected Quarterly Data (Unaudited) [Abstract]

Selected Quarterly Data (Unaudited)

	First Quarter			Second Quarter			Third Quarter			Fourth Quarter
Fiscal Year 2013:	(in thousands, except per share amounts)
Revenue	$	9,357		$	8,118		$	10,398		$	6,925
Gross margin	$	1,378		$	2,453		$	(2,677	)	$	3,159
Provision for income taxes	$	(480	)	$	(800	)	$	2,560		$	580
Net loss attributable to Amtech Systems, Inc.	$	(4,194	)	$	(2,092	)	$	(12,101	)	$	(1,682	)
Comprehensive loss attributable to Amtech Systems, Inc.	$	(2,791	)	$	(3,555	)	$	(11,387	)	$	(75	)
Net loss per share attributable to Amtech Systems, Inc.:
Basic earnings per share	$	(0.44	)	$	(0.22	)	$	(1.27	)	$	(0.18	)
Shares used in calculation	9,494			9,539			9,539			9,543
Diluted earnings per share	$	(0.44	)	$	(0.22	)	$	(1.27	)	$	(0.18	)
Shares used in calculation	9,494			9,539			9,539			9,543
Fiscal Year 2012:
Revenue	$	24,728		$	21,566		$	24,300		$	10,945
Gross margin	$	7,201		$	4,048		$	4,804		$	(6,860	)
Provision for income taxes	$	(320	)	$	(220	)	$	(1,110	)	$	(3,670	)
Net loss attributable to Amtech Systems, Inc.	$	(876	)	$	(5,079	)	$	(2,965	)	$	(14,111	)
Comprehensive loss attributable to Amtech Systems, Inc.	$	(4,607	)	$	(2,877	)	$	(6,816	)	$	(13,470	)
Net loss per share attributable to Amtech Systems, Inc.:
Basic earnings per share	$	(0.09	)	$	(0.54	)	$	(0.31	)	$	(1.49	)
Shares used in calculation	9,446			9,479			9,479			9,482
Diluted earnings per share	$	(0.09	)	$	(0.54	)	$	(0.31	)	$	(1.49	)
Shares used in calculation	9,446			9,479			9,479			9,482