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Earnings Per Share (Tables)
 12 Months Ended
Sep. 30, 2013
Earnings Per Share [Abstract]  
Schedule of Earnings Per Share, Basic and Diluted
 
2013
 
2012
 
2011
 
(dollars in thousands, except per share amounts)
Basic Earnings Per Share Computation
 
 
Net income (loss) attributable to Amtech Systems, Inc.
$
(20,069
)
 
$
(23,031
)
 
$
22,882

Weighted Average Shares Outstanding:
 
 
 
 
 
Common stock
9,529

 
9,471

 
9,480

Basic earnings (loss) per share attributable to Amtech shareholders
$
(2.11
)
 
$
(2.43
)
 
$
2.41

Diluted Earnings Per Share Computation
 
 
 
 
 
Net income (loss) attributable to Amtech Systems, Inc.
$
(20,069
)
 
$
(23,031
)
 
$
22,882

Weighted Average Shares Outstanding:
 
 
 
 
 
Common stock
9,529

 
9,471

 
9,480

Common stock equivalents (1)
—

 
—

 
284

Diluted shares
9,529

 
9,471

 
9,764

Diluted earnings (loss) per share attributable to Amtech shareholders
$
(2.11
)
 
$
(2.43
)
 
$
2.34


(1) The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.