Business Segment Information (Details) (USD $) In Thousands, unless otherwise specified	3 Months Ended		6 Months Ended
	Mar. 31, 2013	Mar. 31, 2012	Mar. 31, 2013	Mar. 31, 2012	Sep. 30, 2012	Sep. 30, 2011
Segment Reporting Information [Line Items]
Net Revenues:	$ 8,118	$ 21,566	$ 17,475	$ 46,294
Operating Income (Loss):	(3,461)	(5,985)	(8,212)	(7,829)
Identifiable Assets	114,818		114,818		129,022
Goodwill	8,348	13,236	8,348	13,236	8,355	13,313
Solar and semiconductor equipment [Member]
Segment Reporting Information [Line Items]
Net Revenues:	6,187	19,682	13,222	42,559
Operating Income (Loss):	(3,604)	(6,052)	(8,276)	(8,042)
Identifiable Assets	110,451		110,451		123,923
Goodwill	7,620		7,620		7,627
Polishing supplies and equipment [Member]
Segment Reporting Information [Line Items]
Net Revenues:	1,931	1,884	4,253	3,735
Operating Income (Loss):	143	67	64	213
Identifiable Assets	4,367		4,367		5,099
Goodwill	$ 728		$ 728		$ 728