Basis of Presentation - Restricted Cash (Details) (USD $) In Thousands, unless otherwise specified	Mar. 31, 2013	Sep. 30, 2012
Restricted Cash and Cash Equivalents Items [Line Items]
Restricted cash	$ 6,710	$ 4,644
Collateral for bank guarantees [Member]
Restricted Cash and Cash Equivalents Items [Line Items]
Restricted cash	3,100	3,800
Research and development ion implant technology [Member]
Restricted Cash and Cash Equivalents Items [Line Items]
Restricted cash	1,400	800
Research and development passed through to RD partners [Member]
Restricted Cash and Cash Equivalents Items [Line Items]
Restricted cash	$ 2,200

- Definition

The carrying amounts of cash and cash equivalent items which are restricted as to withdrawal or usage. Restrictions may include legally restricted deposits held as compensating balances against short-term borrowing arrangements, contracts entered into with others, or entity statements of intention with regard to particular deposits; however, time deposits and short-term certificates of deposit are not generally included in legally restricted deposits. Excludes compensating balance arrangements that are not agreements which legally restrict the use of cash amounts shown on the balance sheet. For a classified balance sheet represents the current portion only (the noncurrent portion has a separate concept); there is a separate and distinct element for unclassified presentations.

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