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Condensed Consolidated Statements Of Comprehensive Income (Loss) (Unaudited) (USD $)
In Thousands, unless otherwise specified
3 Months Ended
Dec. 31, 2012
Dec. 31, 2011
Statement of Other Comprehensive Income [Abstract]    
Net loss $ (4,268) $ (1,437)
Foreign currency translation adjustment 1,391 (3,737)
Comprehensive loss (2,877) (5,174)
Comprehensive loss attributable to noncontrolling interest 86 567
Comprehensive loss attributable to Amtech Systems, Inc. $ (2,791) $ (4,607)