Business Segment Information (Details) (USD $) In Thousands, unless otherwise specified	3 Months Ended
	Dec. 31, 2012	Dec. 31, 2011	Sep. 30, 2012	Sep. 30, 2011
Segment Reporting Information [Line Items]
Net Revenues:	$ 9,357	$ 24,728
Operating Income (Loss):	(4,752)	(1,844)
Identifiable Assets	124,900		129,022
Goodwill	8,423	13,117	8,355	13,313
Solar and semiconductor equipment [Member]
Segment Reporting Information [Line Items]
Net Revenues:	7,034	22,877
Operating Income (Loss):	(4,673)	(1,990)
Identifiable Assets	120,485		123,923
Goodwill	7,695		7,627
Polishing supplies and equipment [Member]
Segment Reporting Information [Line Items]
Net Revenues:	2,323	1,851
Operating Income (Loss):	(79)	146
Identifiable Assets	4,415		5,099
Goodwill	$ 728		$ 728