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Earnings Per Share (Tables)
 12 Months Ended
Sep. 30, 2012
Earnings Per Share [Abstract]  
Schedule of Earnings Per Share, Basic and Diluted
Options and restricted stock of approximately 1,020,000, 145,000 and 229,000 shares are excluded from the fiscal 2012, 2011 and 2010 earnings per share calculations as they are anti-dilutive.
 
 
2012
 
2011
 
2010
 
(dollars in thousands, except per share amounts)
Basic Earnings Per Share Computation
 
 
Net income (loss) attributable to Amtech Systems, Inc.
$
(23,031
)
 
$
22,882

 
$
9,563

Weighted Average Shares Outstanding:
 
 
 
 
 
Common stock
9,471

 
9,480

 
9,022

Basic earnings (loss) per share attributable to Amtech shareholders
$
(2.43
)
 
$
2.41

 
$
1.06

Diluted Earnings Per Share Computation
 
 
 
 
 
Net income (loss) attributable to Amtech Systems, Inc.
$
(23,031
)
 
$
22,882

 
$
9,563

Weighted Average Shares Outstanding:
 
 
 
 
 
Common stock
9,471

 
9,480

 
9,022

Common stock equivalents (1)
—

 
284

 
215

Diluted shares
9,471

 
9,764

 
9,237

Diluted earnings (loss) per share attributable to Amtech shareholders
$
(2.43
)
 
$
2.34

 
$
1.04


(1) The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.