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Selected Quarterly Data
 12 Months Ended
Sep. 30, 2012
Selected Quarterly Data (Unaudited) [Abstract]  
Selected Quarterly Data (Unaudited)
Selected Quarterly Data (Unaudited)
 
 
First Quarter
 
Second Quarter
 
Third Quarter
 
Fourth Quarter
Fiscal Year 2012:
(in thousands, except per share amounts)
Revenue
$
24,728

 
$
21,566

 
$
24,300

 
$
10,945

Gross margin
$
7,201

 
$
4,048

 
$
4,804

 
$
(6,860
)
Provision for income taxes
$
(320
)
 
$
(220
)
 
$
(1,110
)
 
$
(3,670
)
Net loss attributable to Amtech Systems, Inc.
$
(876
)
 
$
(5,079
)
 
$
(2,965
)
 
$
(14,111
)
Comprehensive loss attributable to Amtech Systems, Inc.
$
(4,607
)
 
$
(2,877
)
 
$
(6,816
)
 
$
(13,470
)
Net loss per share attributable to Amtech Systems, Inc.:
 
 
 
 
 
 
 
Basic
$
(0.09
)
 
$
(0.54
)
 
$
(0.31
)
 
$
(1.49
)
Shares used in calculation
9,446

 
9,479

 
9,479

 
9,482

Diluted
$
(0.09
)
 
$
(0.54
)
 
$
(0.31
)
 
$
(1.49
)
Shares used in calculation
9,446

 
9,479

 
9,479

 
9,482

 
 
 
 
 
 
 
 
Fiscal Year 2011:
(in thousands, except per share amounts)
Revenue
$
53,712

 
$
61,253

 
$
71,871

 
$
59,868

Gross margin
$
19,597

 
$
24,703

 
$
26,116

 
$
20,242

Provision for income taxes
$
3,330

 
$
5,100

 
$
5,160

 
$
2,600

Net income attributable to Amtech Systems, Inc.
$
4,992

 
$
7,517

 
$
7,298

 
$
3,075

Comprehensive income (loss) attributable to Amtech Systems, Inc.
$
3,539

 
$
11,430

 
$
8,744

 
$
(1,927
)
Net income per share:
 
 
 
 
 
 
 
Basic
$
0.54

 
$
0.79

 
$
0.76

 
$
0.32

Shares used in calculation
9,278

 
9,487

 
9,576

 
9,581

Diluted
$
0.52

 
$
0.77

 
$
0.74

 
$
0.31

Shares used in calculation
9,609

 
9,781

 
9,852

 
9,778