Condensed Consolidated Statements of Operations (USD $) In Thousands, except Per Share data, unless otherwise specified	3 Months Ended		9 Months Ended
	Jun. 30, 2012	Jun. 30, 2011	Jun. 30, 2012	Jun. 30, 2011
Revenues, net of returns and allowances	$ 24,300	$ 71,871	$ 70,594	$ 186,836
Cost of sales	19,496	45,755	54,541	116,421
Gross profit	4,804	26,116	16,053	70,415
Selling, general and administrative	6,360	12,034	18,698	33,680
Impairment charges	0	0	688	0
Research and development	3,694	1,935	9,746	3,717
Operating income (loss)	(5,250)	12,147	(13,079)	33,018
Interest and other income (expense), net	69	73	195	118
Income (loss) before income taxes	(5,181)	12,220	(12,884)	33,136
Income tax provision (benefit)	(1,110)	5,160	(1,650)	13,590
Net income (loss)	(4,071)	7,060	(11,234)	19,546
Add: Net Loss Attributable to noncontrolling interest	1,106	238	2,314	261
Net income (loss) attributable to Amtech Systems, Inc.	$ (2,965)	$ 7,298	$ (8,920)	$ 19,807
Earnings (Loss) Per Share:
Basic income (loss) per share attributable to Amtech shareholders (dollars per share)	$ (0.31)	$ 0.76	$ (0.94)	$ 2.10
Weighted average shares outstanding (in shares)	9,479	9,576	9,468	9,446
Diluted income (loss) per share attributable to Amtech shareholders (dollars per share)	$ (0.31)	$ 0.74	$ (0.94)	$ 2.03
Weighted average shares outstanding (in shares)	9,479	9,852	9,468	9,754