Condensed Consolidated Statements of Operations (USD $) In Thousands, except Per Share data, unless otherwise specified	3 Months Ended		6 Months Ended
	Mar. 31, 2012	Mar. 31, 2011	Mar. 31, 2012	Mar. 31, 2011
Revenues, net of returns and allowances	$ 21,566	$ 61,253	$ 46,294	$ 114,965
Cost of sales	17,518	36,550	35,045	70,666
Gross profit	4,048	24,703	11,249	44,299
Selling, general and administrative	6,046	11,249	12,338	21,646
Impairment charges	688	0	688	0
Research and development	3,299	934	6,052	1,782
Operating income (loss)	(5,985)	12,520	(7,829)	20,871
Interest and other income (expense), net	39	75	126	46
Income (loss) before income taxes	(5,946)	12,595	(7,703)	20,917
Income tax provision (benefit)	(220)	5,100	(540)	8,430
Net income (loss)	(5,726)	7,495	(7,163)	12,487
Add: Net Loss Attributable to noncontrolling interest	647	22	1,208	22
Net income (loss) attributable to Amtech Systems, Inc.	$ (5,079)	$ 7,517	$ (5,955)	$ 12,509
Earnings (Loss) Per Share:
Basic income (loss) per share attributable to Amtech shareholders	$ (0.54)	$ 0.79	$ (0.63)	$ 1.33
Weighted average shares outstanding	9,479	9,487	9,462	9,381
Diluted income (loss) per share attributable to Amtech shareholders	$ (0.54)	$ 0.77	$ (0.63)	$ 1.29
Weighted average shares outstanding	9,479	9,781	9,462	9,702