Condensed Consolidated Balance Sheets (USD $) In Thousands, unless otherwise specified	Mar. 31, 2012	Sep. 30, 2011
Current Assets
Cash and cash equivalents	$ 48,769	$ 67,382
Restricted cash	3,647	6,571
Accounts receivable
Trade (less allowance for doubtful accounts of $372 and $246 at March 31, 2012 and September 30, 2011, respectively)	11,290	14,447
Unbilled and other	20,958	30,822
Inventories	36,866	37,162
Deferred income taxes	9,550	9,560
Prepaid income taxes	3,580	4,260
Other	4,383	4,647
Total current assets	139,043	174,851
Property, Plant and Equipment - Net	12,998	12,680
Intangible Assets - Net	4,316	5,021
Goodwill	13,236	13,313
Total Assets	169,593	205,865
Current Liabilities
Accounts payable	6,733	8,928
Accrued compensation and related taxes	6,505	10,686
Accrued warranty expense	2,686	2,265
Deferred profit	19,013	27,608
Customer deposits	3,412	7,862
Other accrued liabilities	2,136	6,775
Income taxes payable	12,090	16,670
Total current liabilities	52,575	80,794
Income Taxes Payable Long-term	2,390	2,630
Deferred Income Taxes Long-term	90	110
Total liabilities	55,055	83,534
Commitments and Contingencies
Stockholders' Equity
Preferred stock; 100,000,000 shares authorized; none issued	0	0
Common stock; $0.01 par value; 100,000,000 shares authorized; shares issued and outstanding: 9,479,007 and 9,431,393 at March 31, 2012 and September 30, 2011, respectively	95	94
Additional paid-in capital	84,112	83,207
Accumulated other comprehensive (loss)	(3,607)	(2,078)
Retained Earnings	29,143	35,096
Total Amtech Systems Inc. stockholders' equity	109,743	116,319
Noncontrolling interest	4,795	6,012
Total Equity	114,538	122,331
Total Liabilities and Stockholders' Equity	$ 169,593	$ 205,865