Condensed Consolidated Statements of Operations (USD $) In Thousands, except Per Share data, unless otherwise specified	3 Months Ended
	Dec. 31, 2011	Dec. 31, 2010
Revenues, net of returns and allowances	$ 24,728	$ 53,712
Cost of sales	17,527	34,115
Gross profit	7,201	19,597
Selling, general and administrative	6,292	10,397
Research and development	2,753	848
Operating income (loss)	(1,844)	8,352
Interest and other income (expense), net	87	(30)
Income (loss) before income taxes	(1,757)	8,322
Income tax provision (benefit)	(320)	3,330
Net income (loss)	(1,437)	4,992
Add: Net Loss Attributable to noncontrolling interest	561	0
Net income (loss) attributable to Amtech Systems, Inc.	$ (876)	$ 4,992
Earnings (Loss) Per Share:
Basic income (loss) per share attributable to Amtech shareholders	$ (0.09)	$ 0.54
Weighted average shares outstanding	9,446	9,278
Diluted income (loss) per share attributable to Amtech shareholders	$ (0.09)	$ 0.52
Weighted average shares outstanding	9,446	9,609