Condensed Consolidated Balance Sheets (USD $) In Thousands, unless otherwise specified	Dec. 31, 2011	Sep. 30, 2011
Current Assets
Cash and cash equivalents	$ 54,936	$ 67,382
Restricted cash	6,854	6,571
Accounts receivable
Trade (less allowance for doubtful accounts of $298 and $246 at December 31, 2011 and September 30, 2011, respectively)	10,560	14,447
Unbilled and other	22,950	30,822
Inventories	37,451	37,162
Deferred income taxes	9,530	9,560
Prepaid income taxes	4,400	4,260
Other	4,729	4,647
Total current assets	151,410	174,851
Property, Plant and Equipment - Net	12,059	12,680
Intangible Assets - Net	4,738	5,021
Goodwill	13,117	13,313
Total Assets	181,324	205,865
Current Liabilities
Accounts payable	6,510	8,928
Accrued compensation and related taxes	6,600	10,686
Accrued warranty expense	2,313	2,265
Deferred profit	21,633	27,608
Customer deposits	5,646	7,862
Other accrued liabilities	2,357	6,775
Income taxes payable	16,220	16,670
Total current liabilities	61,279	80,794
Income Taxes Payable Long-term	2,360	2,630
Deferred Income Taxes -Long Term	60	110
Total liabilities	63,699	83,534
Commitments and Contingencies
Stockholders' Equity
Preferred stock; 100,000,000 shares authorized; none issued	0	0
Common stock; $0.01 par value; 100,000,000 shares authorized; shares issued and outstanding: 9,478,457 and 9,431,393 at December 31, 2011 and September 30, 2011, respectively	95	94
Additional paid-in capital	83,672	83,207
Accumulated other comprehensive (loss)	(5,809)	(2,078)
Retained Earnings	34,222	35,096
Total Amtech Systems Inc. stockholders' equity	112,180	116,319
Noncontrolling interest	5,445	6,012
Total Equity	117,625	122,331
Total Liabilities and Stockholders' Equity	$ 181,324	$ 205,865