Consolidated Balance Sheets (USD $) In Thousands	Sep. 30, 2011	Sep. 30, 2010
Current Assets
Cash and cash equivalents	$ 67,382	$ 56,764
Restricted cash	6,571	6,192
Accounts receivable
Trade (less allowance for doubtful accounts of $246 and $181 at September 30, 2011 and September 30, 2010, respectively)	14,447	9,252
Unbilled and other	30,822	15,231
Inventories	37,162	24,317
Deferred income taxes	9,560	2,130
Prepaid income taxes	4,260	0
Other	4,647	2,568
Total current assets	174,851	116,454
Property, Plant and Equipment - Net	12,680	9,577
Deferred Income Taxes - Long Term	0	2,660
Intangible Assets - Net	5,021	2,571
Goodwill	13,313	4,839
Total Assets	205,865	136,101
Current Liabilities
Accounts payable	8,928	12,446
Accrued compensation and related taxes	10,686	8,305
Accrued warranty expense	2,265	1,843
Deferred profit	27,608	11,439
Customer deposits	7,862	8,858
Other accrued liabilities	6,775	1,605
Income taxes payable	16,670	6,320
Total current liabilities	80,794	50,816
Income Taxes Payable Long-term	2,630	1,010
Deferred Income Taxes - Long Term	110	0
Other Long-Term Obligations	0	32
Total liabilities	83,534	51,858
Commitments and Contingencies
Stockholders' Equity
Preferred stock; 100,000,000 shares authorized; none issued	0	0
Common stock; $0.01 par value; 100,000,000 shares authorized; shares issued and outstanding: 9,431,393 and 9,209,213 at September 30, 2011 and September 30, 2010, respectively	94	92
Additional paid-in capital	83,207	72,919
Accumulated other comprehensive income	(2,078)	(982)
Retained earnings	35,096	12,214
Total Amtech Systems Inc. stockholders' equity	116,319	84,243
Noncontrolling interest	6,012	0
Total Equity	122,331	84,243
Total Liabilities and Stockholders' Equity	$ 205,865	$ 136,101